M.D.Excimer inc

Excimer Lamp Unit

For Wash / Wet 有機物去除

無電極Excimer Lamp

(Gridless Excimer Lamp)

　

Wavelength:

172nm,185nm,253nm,308nm

　

Model : MEB

　

　

　

　

　

Model

Effective length (mm)
MEB-200 200
MEB-330 330
MEB-500 500
MEB-750 750
MEB-900 900
MEB-1100 1100
MEB-1300 1300
MEB-1500 1500
MEB-2250 2250

Excimer照射Unit, In-line照射

(Excimer Irradiation Unit)

　

Model : MEUT

　

　

　

　

　

　

　

　

Wavelength

172nm
Filled gas Xe
Lamp style Straight
Intensity 50 mW/cm
Lamp life 1500h
Utility AC100V ~ 200V 50/60Hz
Water 2L/min x The Number of Lamps

研究開發用Excimer VUV照射裝置

Model : MEIR-S-1-200

＊With Conveyer

研究開發用Excimer VUV照射裝置

Model : MEIR-M-1-200

＊Without Conveyer

<BACK>