| Product name | MP580 | MP230 | MP130 | MP100 | MP060 | MP040 |
| av. pore diameter(£gm) | 580 | 230 | 130 | 100 | 60 | 40 |
| porosity(%) | 28 | 29 | 30 | 31 | 33 | 35 |
Standard products table
| Shape | size | chucking portion | remarks |
| round plate | Ø100x15t | Ø75 | for 3-inch wafer |
| Ø125x15t | Ø100 | for 4-inch wafer | |
| Ø150x15t | Ø150 | for 5-inch wafer | |
| Ø175x15t | Ø151 | for 6-inch wafer | |
| Ø230x15t | Ø202 | for 8-inch wafer | |
| Ø330x15t | Ø303 | for 12-inch wafer | |
| square plate | 200x150x15t | 180x140 | - |
| 300x200x15t | 280x180 | - |