| Name | ¡@ | Aluminum Nitride | ||
| ¡@ | MAN-090 | MAN-170 | MAN-230 | |
| Composition | ¡@ | AIN | AIN | AIN |
| General Properties | Color | Gray | Gray | Gray |
| Bulk Density(g/cm3) | 3.2 | 3.2 | 3.3 | |
| Water Adsorption Ratio(%) | 0 | 0 | 0 | |
| Mechanical Properties | Bending Strength (MPa) | 350 | 350 | 350 |
| Compressive Strength (MPa) | - | 3000 | - | |
| Young's Modulus (GPa) | - | 320 | - | |
| Poisson's Ratio | - | 0.27 | - | |
| Hardness (GPA) | - | 14 | - | |
| Electrical Properties | Volume Resistivity [RT] (£[¡Ecm) | 0.1x1015 | 0.1x1015 | 0.1x1015 |
| [500¢J] (£[¡Ecm) | - | 30x106 | - | |
| Dielectric Constand [1MHz] | 8.8 | 8.8 | 8.8 | |
| Dielectric Tangent [1MHz] | 0.0005 | 0.0005 | 0.0005 | |
| Dielectric Strength (kV/mm) | 15 | 15 | 15 | |
| Theremal Properties | Max. Useable Temperature (¢J) | - | - | - |
| Thermal Expansion [RT-200¢J] (/¢J) | 4.5x10-6 | 4.5x10-6 | 4.5x10-6 | |
| [RT-400¢J] (/¢J) | - | - | - | |
| [RT-600¢J] (/¢J) | - | - | - | |
| [RT-800¢J] (/¢J) | - | - | - | |
| Thermal Conductivity [RT] (W/m¡Ek) | 90 | 170 | 230 | |
| [400¢J] (W/m¡Ek) | - | 80 | - | |
| [800¢J] (W/m¡Ek) | - | 50 | - | |
| Specific Heat [RT] (kj/kg¡Ek) | - | 0.7 | - | |
| [400¢J] (kj/kg¡Ek) | - | 1.1 | - | |
| [800¢J] (kj/kg¡Ek) | - | 1.2 | - | |
| Thermal Shock Strength (¢J) | - | 400 | - | |
| Remarks | No sintering additive excellent resistance to F plasma | general grade | high thermal conductivity | |